2.Experiment
3.Results
4.Conclusions
n-type semi conductor
hexagonal wurtzite structure
good transparency
high electron mobility
wide band gap
Nanowire?
A nanowire is a nanostructure, with the diameter of the order of a nanometer (10−9 meters).
• Sputtering?
Sputtering is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic particles.
Advantage
Sputtering of insulating film
Homogeneities of film thickness
useable for large target
Advantage
Sputtering of insulating film
Homogeneities of film thickness
useable for large target

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